Micro-electromechani standards english version

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 34900-2017

Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 34900-2017
Standard Category	China National Standards
GB Standard English Title	Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer
GB Standard Chinese Title	微机电系统（MEMS）技术基于光学干涉的MEMS微结构残余应变测量方法
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