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GB/T 42897-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS nano-thickness film tensile strength test method 微机电系统(MEMS)技术 硅基MEMS纳米厚度膜抗拉强度试验方法 - 英文版 |
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GB/T 42896-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS nanoscale structure impact test method 微机电系统(MEMS)技术 硅基MEMS纳尺度结构冲击试验方法 - 英文版 |
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GB/T 42895-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS microstructure bending strength test method 微机电系统(MEMS)技术 硅基MEMS微结构弯曲强度试验方法 - 英文版 |
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GB/T 42709.7-2023 Semiconductor devices Microelectromechanical devices Part 7: MEMS bulk acoustic wave filters and duplexers for radio frequency control and selection 半导体器件 微电子机械器件 第7部分:用于射频控制和选择的MEMS体声波滤波器和双工器 - 英文版 |
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GB/T 42709.5-2023 Semiconductor devices Microelectromechanical devices Part 5: RF MEMS switches 半导体器件 微电子机械器件 第5部分:射频MEMS开关 - 英文版 |
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GB/T 41852-2022 Semiconductor devices; Microelectromechanical devices; bending and shearing test methods for bonding strength of MEMS structures 半导体器件 微机电器件 MEMS结构黏结强度的弯曲和剪切试验方法 - 英文版 |
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