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GB/T 43493.1-2023
Semiconductor devices - Non-destructive testing and identification criteria for defects in silicon carbide homoepitaxial wafers for power devices - Part 1: Defect classification
- 英文版
GB/T 42905-2023
Testing of Silicon Carbide Epitaxial Layer Thickness Infrared Reflection Method
- 英文版
GB/T 42902-2023
Testing of surface defects of silicon carbide epitaxial wafers Laser scattering method
- 英文版
GB/T 14146-2021
Test method for carrier concentration of Silicon epitaxial layers - Capacitance-voltage method
- 英文版
GB/T 14142-2017
Test method for crystallographic perfection of epitaxial layers in silicon—Etching technique
- 英文版
GB/T 30652-2014
Trichlorosilane for silicon epitaxial
- 英文版
GB/T 14863-2013
Method for net carrier density in Silicon epitaxial layers by voltage-capacitance of gated and ungated diodes
- 英文版
GB/T 14847-2010
Test mothod for thickness of lightly doped Silicon epitaxial layers on heavily doped silicon substrates by infrared reflectance
- 英文版
GB/T 14146-2009
Silicon epitaxial layers-determination of carrier concentration-mercury probe voltages-capacitance method
- 英文版
GB/T 14141-2009
Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array
- 英文版

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