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GB/T 25915.13-2022
Cleanrooms and related controlled environments - Part 13: Surface cleaning to particle and chemical cleanliness requirements
洁净室及相关受控环境 第13部分:达到粒子和化学洁净度要求的表面清洁 - 英文版
GB/T 25915.2-2021
Cleanrooms and associated controlled environments—Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
洁净室及相关受控环境 第2部分:洁净室空气粒子浓度的监测 - 英文版

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