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GB/T 42897-2023
Microelectromechanical systems (MEMS) technology Silicon-based MEMS nano-thickness film tensile strength test method
微机电系统(MEMS)技术 硅基MEMS纳米厚度膜抗拉强度试验方法 - 英文版
GB/T 42896-2023
Microelectromechanical systems (MEMS) technology Silicon-based MEMS nanoscale structure impact test method
微机电系统(MEMS)技术 硅基MEMS纳尺度结构冲击试验方法 - 英文版
GB/T 42895-2023
Microelectromechanical systems (MEMS) technology Silicon-based MEMS microstructure bending strength test method
微机电系统(MEMS)技术 硅基MEMS微结构弯曲强度试验方法 - 英文版
GB/T 42709.7-2023
Semiconductor devices Microelectromechanical devices Part 7: MEMS bulk acoustic wave filters and duplexers for radio frequency control and selection
半导体器件 微电子机械器件 第7部分:用于射频控制和选择的MEMS体声波滤波器和双工器 - 英文版
GB/T 42709.5-2023
Semiconductor devices Microelectromechanical devices Part 5: RF MEMS switches
半导体器件 微电子机械器件 第5部分:射频MEMS开关 - 英文版
GB/T 41852-2022
Semiconductor devices; Microelectromechanical devices; bending and shearing test methods for bonding strength of MEMS structures
半导体器件 微机电器件 MEMS结构黏结强度的弯曲和剪切试验方法 - 英文版

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