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GB/T 30652-2023
Trichlorosilane for silicon epitaxy
硅外延用三氯氢硅 - 英文版
GB/T 28654-2018
Trichlorosilane for industrial use
工业三氯氢硅 - 英文版
GB/T 35498-2017
VinylTrichlorosilane for industrial use
工业用乙烯基三氯硅烷 - 英文版
GB/T 30652-2014
Trichlorosilane for silicon epitaxial
硅外延用三氯氢硅 - 英文版
GB/T 30302-2013
PhenylTrichlorosilane for industial use
工业用苯基三氯硅烷 - 英文版
GB/T 29056-2012
Trichlorosilane for silicon epitaxy - Determination of boron,aluminium,phosphorus,vanadium,chrome,manganese,iron,cobalt,nickel,copper,molybdenum,arsenic and antimony content - Inductively coupled plasma mass spectrometric method
硅外延用三氯氢硅化学分析方法 硼、铝、磷、钒、铬、锰、铁、钴、镍、铜、钼、砷和锑量的测定 电感耦合等离子体质谱法 - 英文版
GB 28654-2012
Trichlorosilane for industrial use
工业三氯氢硅 - 英文版

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