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GB/T 42897-2023
Microelectromechanical systems (MEMS) technology Silicon-based MEMS nano-thickness film tensile strength test method
- 英文版
GB/T 42896-2023
Microelectromechanical systems (MEMS) technology Silicon-based MEMS nanoscale structure impact test method
- 英文版
GB/T 42895-2023
Microelectromechanical systems (MEMS) technology Silicon-based MEMS microstructure bending strength test method
- 英文版
GB/T 42709.7-2023
Semiconductor devices Microelectromechanical devices Part 7: MEMS bulk acoustic wave filters and duplexers for radio frequency control and selection
- 英文版
GB/T 42709.5-2023
Semiconductor devices Microelectromechanical devices Part 5: RF MEMS switches
- 英文版
GB/T 41852-2022
Semiconductor devices; Microelectromechanical devices; bending and shearing test methods for bonding strength of MEMS structures
- 英文版

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