GB/T 17866-1999 Standard PDF file download ; GB/T 17866-1999 Standard english preview version download

GB Standard Code	GB/T 17866-1999
Standard Category	China National Standards
GB Standard English Title	Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems
GB Standard Chinese Title	掩模缺陷检查系统灵敏度分析所用的特制缺陷掩模和评估测量方法准则
Chinese Version Price	$15 USD per 50 pages
English Translation Price	About $15 per 1 page; Inquire us for detail price

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