GB/T 29056-2012 standard english preview version PDF file download
GB Standard Code
GB/T 29056-2012
Standard Category
China National Standards
GB Standard English Title
Trichlorosilane for silicon epitaxy - Determination of boron,aluminium,phosphorus,vanadium,chrome,manganese,iron,cobalt,nickel,copper,molybdenum,arsenic and antimony content - Inductively coupled plasma mass spectrometric method
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