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GB/T 17866-1999 standard english preview version PDF file download

GB Standard Code GB/T 17866-1999
Standard Category China National Standards
GB Standard English Title Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems
GB Standard Chinese Title 掩模缺陷检查系统灵敏度分析所用的特制缺陷掩模和评估测量方法准则
Chinese Version Price $15 USD per 50 pages
English Translation Price About $15  per 1 page; Inquire us for detail price

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