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NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 42263-2022

Determination of nitrogen content in silicon single crystals - Secondary ion mass spectrometry

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 42263-2022
Standard Category	China National Standards
GB Standard English Title	Determination of nitrogen content in silicon single crystals - Secondary ion mass spectrometry
GB Standard Chinese Title	硅单晶中氮含量的测定二次离子质谱法
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