GB/T 14847-2010 standards english version

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 14847-2010

Test mothod for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates by infrared reflectance

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 14847-2010
Standard Category	China National Standards
GB Standard English Title	Test mothod for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates by infrared reflectance
GB Standard Chinese Title	重掺杂衬底上轻掺杂硅外延层厚度的红外反射测量方法
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