GB/T 15862-2012 standards english version

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 15862-2012

General specification of ion implantation equipment

Issued Date:

Implemented Date:

Issued by:

The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 15862-2012
Standard Category	China National Standards
GB Standard English Title	General specification of ion implantation equipment
GB Standard Chinese Title	离子注入机通用规范
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English Translation Fee	About $15 per 1 page (1,000 words)
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