GB/T 17866-1999 standards english version

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 17866-1999

Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems

Issued Date:

Implemented Date:

Issued by:

The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 17866-1999
Standard Category	China National Standards
GB Standard English Title	Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems
GB Standard Chinese Title	掩模缺陷检查系统灵敏度分析所用的特制缺陷掩模和评估测量方法准则
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