GB/T 19922-2005 standards english version

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 19922-2005

Standard test methods for measuring site flatness on silicon wafers by noncontact scanning

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 19922-2005
Standard Category	China National Standards
GB Standard English Title	Standard test methods for measuring site flatness on silicon wafers by noncontact scanning
GB Standard Chinese Title	硅片局部平整度非接触式标准测试方法
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