GB/T 26070-2010 standards english version

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 26070-2010

Characterization of subsurface damage in polished compound semiconductor wafers by reflectance difference spectroscopy method

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 26070-2010
Standard Category	China National Standards
GB Standard English Title	Characterization of subsurface damage in polished compound semiconductor wafers by reflectance difference spectroscopy method
GB Standard Chinese Title	化合物半导体抛光晶片亚表面损伤的反射差分谱测试方法
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