GB/T 31225-2014 standards english version

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 31225-2014

Test method for the thickness of silicon oxide on Si substrate by ellipsometer

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 31225-2014
Standard Category	China National Standards
GB Standard English Title	Test method for the thickness of silicon oxide on Si substrate by ellipsometer
GB Standard Chinese Title	椭圆偏振仪测量硅表面上二氧化硅薄层厚度的方法
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