GB/T 40110-2021 standards english version

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 40110-2021

Surface chemical analysis - Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 40110-2021
Standard Category	China National Standards
GB Standard English Title	Surface chemical analysis - Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
GB Standard Chinese Title	表面化学分析全反射X射线荧光光谱法（TXRF）测定硅片表面元素污染
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