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GB/T 43493.3-2023 Semiconductor devices - Non-destructive testing and identification criteria for defects in silicon carbide homoepitaxial wafers for power devices - Part 3: Photoluminescence detection method of defects 半导体器件 功率器件用碳化硅同质外延片缺陷的无损检测识别判据 第3部分：缺陷的光致发光检测方法 - 中英文版 |
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GB/T 43315-2023 Detection of silicon wafer flow pattern defects Corrosion method 硅片流动图形缺陷的检测 腐蚀法 - 中英文版 |
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GB/T 4058-2009 Test method for detection of oxidation induced defects in polished silicon wafers 硅抛光片氧化诱生缺陷的检验方法 - 中英文版 |
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