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GB/T 30868-2014
Test method for measuring micropipe density of monocrystalline silicon carbide wafers―Chemically etching
碳化硅单晶片微管密度的测定 化学腐蚀法 - 中英文版
GB/T 30867-2014
Test method for measuring thickness and total thickness variation of monocrystalline silicon carbide wafers
碳化硅单晶片厚度和总厚度变化测试方法 - 中英文版
GB/T 30866-2014
Test method for measuring diameter of monocrystalline silicon carbide wafers
碳化硅单晶片直径测试方法 - 中英文版
GB/T 30454-2013
Test methods of silicate phosphors activated by rare earths for LED
LED用稀土硅酸盐荧光粉试验方法 - 中英文版
GB/T 29852-2013
Test method for measuring Phosphorus, Arsenic and Antimony in silicon materials used for photovoltaic applications by secondary ion mass spectrometry
光伏电池用硅材料中P、As、Sb施主杂质含量的二次离子质谱测量方法 - 中英文版
GB/T 29851-2013
Test method for measuring Boron and Aulminium in silicon materials used for photovoltaic applications by secondary ion mass spectrometry
光伏电池用硅材料中B、Al受主杂质含量的二次离子质谱测量方法 - 中英文版
GB/T 29850-2013
Test method for measuring compensation degree of silicon materials used for photovoltaic applications
光伏电池用硅材料补偿度测量方法 - 中英文版
GB/T 29849-2013
Test method for measuring surface metallic contamination of silicon materials used for photovoltaic applications by inductively coupled plasma mass spectrometry
光伏电池用硅材料表面金属杂质含量的电感耦合等离子体质谱测量方法 - 中英文版
GB/T 29507-2013
Test method for measuring flatness, thickness and total thickness variation on silicon wafers by automated non-contact scanning
硅片平整度、厚度及总厚度变化测试 自动非接触扫描法 - 中英文版
GB/T 29505-2013
Test method for measuring surface roughness on planar surfaces of silicon wafer
硅片平坦表面的表面粗糙度测量方法 - 中英文版
GB/T 26068-2010
Test method for carrier recombination lifetime in silicon wafers by non-contact measurement of photoconductivity decay by microwave reflectance
硅片载流子复合寿命的无接触微波反射光电导衰减测试方法 - 中英文版
GB/T 26067-2010
Standard test method for dimensions of notches on silicon wafers
硅片切口尺寸测试方法 - 中英文版
GB/T 6621-2009
Testing methods for surface flatness of silicon slices
硅片表面平整度测试方法 - 中英文版
GB/T 6620-2009
Test method for measuring warp on silicon slices by noncontact scanning
硅片翘曲度非接触式测试方法 - 中英文版
GB/T 6619-2009
Test methods for bow of silicon wafers
硅片弯曲度测试方法 - 中英文版
GB/T 6618-2009
Test method for thickness and total thickness variation of silicon slices
硅片厚度和总厚度变化测试方法 - 中英文版
GB/T 6617-2009
Test method for measuring resistivity of silicon wafer using spreading resistance probe
硅片电阻率测定 扩展电阻探针法 - 中英文版
GB/T 4058-2009
Test method for detection of oxidation induced defects in polished silicon wafers
硅抛光片氧化诱生缺陷的检验方法 - 中英文版
GB/T 24578-2009
Test method for measuring surface metal contamination on silicon wafers by total reflection X-ray fluorescence spectroscopy
硅片表面金属沾污的全反射X光荧光光谱测试方法 - 中英文版
GB/T 24577-2009
Test methods for analyzing organic contaminants on silicon wafer surfaces by thermal desorption gas chromatography
热解吸气相色谱法测定硅片表面的有机污染物 - 中英文版
GB/T 24575-2009
Test method for measuring surface sodium,aluminum,potassium,and iron on silicon and epi substrates by secondary ion mass spectrometry
硅和外延片表面Na、Al、K和Fe的二次离子质谱检测方法 - 中英文版
GB/T 24574-2009
Test methods for photoluminescence analysis of single crystal silicon for III-V impurities
硅单晶中Ⅲ-Ⅴ族杂质的光致发光测试方法 - 中英文版
GB/T 24582-2009
Test method for measuring surface metal contamination of polycrystalline silicon by acid extraction-inductively coupled plasma mass spectrometry
酸浸取 电感耦合等离子质谱仪测定多晶硅表面金属杂质 - 中英文版
GB/T 24581-2009
Test method for low temperature FT-IR analysis of single crystal silicon for Ⅲ-Ⅴ impurities
低温傅立叶变换红外光谱法测量硅单晶中III、V族杂质含量的测试方法 - 中英文版
GB/T 24580-2009
Test method for measuring boron contamination in heavily doped n-type silicon substrates by secondary ion mass spectrometry
重掺n型硅衬底中硼沾污的二次离子质谱检测方法 - 中英文版
GB/T 24579-2009
Test method for measuring surface metal contamination of polycrystalline silicon by acid extraction-atomic absorption spectroscopy
酸浸取 原子吸收光谱法测定多晶硅表面金属污染物 - 中英文版
GB/T 1554-2009
Testing method for crystallographic perfection of silicon by preferential etch techniques
硅晶体完整性化学择优腐蚀检验方法 - 中英文版
GB/T 1553-2009
Test methods for minority carrier lifetime in bulk germanium and silicon by measurement of photoconduetivity decay
硅和锗体内少数载流子寿命测定光电导衰减法 - 中英文版
GB/T 1551-2009
Test method for measuring resistivity of monocrystal silicon
硅单晶电阻率测定方法 - 中英文版
GB/T 14144-2009
Testing method for determination of radial interstitial oxygen variation in silicon
硅晶体中间隙氧含量径向变化测量方法 - 中英文版
GB/T 14141-2009
Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array
硅外延层、扩散层和离子注入层薄层电阻的测定 直排四探针法 - 中英文版
GB/T 13387-2009
Test method for measuring flat length wafers of silicon and other electronic materials
硅及其它电子材料晶片参考面长度测量方法 - 中英文版
GB/T 1558-2009
Test method for substitutional atomic carbon concent of silicon by infrared absorption
硅中代位碳原子含量 红外吸收测量方法 - 中英文版
GB/T 1036-2008
Test method for coefficient of linear thermal expansion of plastics between -30℃ and 30℃ with a vitreous silica dilatometer
塑料 -30℃~30℃线膨胀系数的测定 石英膨胀计法 - 中英文版
GB/T 10701-2008
Test methods for thermal stability of silica glass
石英玻璃热稳定性试验方法 - 中英文版
GB/T 16175-2008
Biological evaluation test methods for medical organic silicon materials
医用有机硅材料生物学评价试验方法 - 中英文版
GB/T 19922-2005
Standard test methods for measuring site flatness on silicon wafers by noncontact scanning
硅片局部平整度非接触式标准测试方法 - 中英文版
GB/T 14142-1993
Test method for crystallographic perfection of epit-axial layers in silicon by etching techniques
硅外延层晶体完整性检查方法 腐蚀法 - 中英文版
GB/T 12442-1990
Test method for the hydroxyl groups contentof silica glass
石英玻璃中羟基含量检验方法 - 中英文版

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