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GB/T 36306-2024 Clean rooms and related controlled environments - Technical requirements for control of chemical pollution in air 洁净室及相关受控环境-空气化学污染控制技术要求 - 中英文版 |
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GB/T 25915.16-2024 Clean rooms and related controlled environments-Part 16: Improving the energy efficiency of clean rooms and air purification devices 洁净室及相关受控环境-第16部分：提升洁净室和空气净化装置的能效 - 中英文版 |
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GB/T 25915.3-2024 Clean rooms and related controlled environments-Part 3: Detection methods 洁净室及相关受控环境-第3部分：检测方法 - 中英文版 |
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GB/T 25915.15-2022 Clean rooms and related controlled environments - Part 15: Suitability assessment of equipment and materials by concentration of gaseous chemicals 洁净室及相关受控环境 第15部分： 按气态化学物浓度评定设备及材料的适用性 - 中英文版 |
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GB/T 25915.14-2022 Clean rooms and related controlled environments - Part 14: Assessment of equipment suitability by particle concentration 洁净室及相关受控环境 第14部分：按粒子浓度评估设备适用性 - 中英文版 |
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GB/T 25915.13-2022 Cleanrooms and related controlled environments - Part 13: Surface cleaning to particle and chemical cleanliness requirements 洁净室及相关受控环境 第13部分：达到粒子和化学洁净度要求的表面清洁 - 中英文版 |
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GB/T 25915.2-2021 Cleanrooms and associated controlled environments—Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration 洁净室及相关受控环境 第2部分：洁净室空气粒子浓度的监测 - 中英文版 |
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