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GB/T 42897-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS nano-thickness film tensile strength test method 微机电系统（MEMS）技术 硅基MEMS纳米厚度膜抗拉强度试验方法 - 中英文版 |
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GB/T 42896-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS nanoscale structure impact test method 微机电系统（MEMS）技术 硅基MEMS纳尺度结构冲击试验方法 - 中英文版 |
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GB/T 42895-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS microstructure bending strength test method 微机电系统（MEMS）技术 硅基MEMS微结构弯曲强度试验方法 - 中英文版 |
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GB/T 42709.7-2023 Semiconductor devices Microelectromechanical devices Part 7: MEMS bulk acoustic wave filters and duplexers for radio frequency control and selection 半导体器件 微电子机械器件 第7部分：用于射频控制和选择的MEMS体声波滤波器和双工器 - 中英文版 |
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GB/T 42709.5-2023 Semiconductor devices Microelectromechanical devices Part 5: RF MEMS switches 半导体器件 微电子机械器件 第5部分：射频MEMS开关 - 中英文版 |
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GB/T 41852-2022 Semiconductor devices; microelectromechanical devices; bending and shearing test methods for bonding strength of MEMS structures 半导体器件 微机电器件 MEMS结构黏结强度的弯曲和剪切试验方法 - 中英文版 |
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GB/T 2900.104-2021 Electrotechnical terminology—Micro-electromechanical devices 电工术语 微机电装置 - 中英文版 |
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GB/T 38446-2020 Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films 微机电系统（MEMS）技术 带状薄膜抗拉性能的试验方法 - 中英文版 |
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GB/T 38447-2020 Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration 微机电系统（MEMS）技术 MEMS结构共振疲劳试验方法 - 中英文版 |
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GB/T 38341-2019 Micro-electromechanical system technology—The reliability test methods of MEMS in integrated environments 微机电系统（MEMS）技术 MEMS器件的可靠性综合环境试验方法 - 中英文版 |
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GB/T 34898-2017 Micro electromechanical system technology—Test method for the nonlinear vibration of the MEMS resonant sensitive element 微机电系统（MEMS）技术 MEMS谐振敏感元件非线性振动测试方法 - 中英文版 |
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GB/T 34894-2017 Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构应变梯度测量方法 - 中英文版 |
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GB/T 34900-2017 Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构残余应变测量方法 - 中英文版 |
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GB/T 34893-2017 Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构面内长度测量方法 - 中英文版 |
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GB/T 34899-2017 Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy 微机电系统（MEMS）技术 基于拉曼光谱法的微结构表面应力测试方法 - 中英文版 |
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GB/T 32817-2016 Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS 半导体器件 微机电器件 MEMS总规范 - 中英文版 |
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GB/T 26113-2010 Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters 微机电系统（MEMS）技术 微几何量评定总则 - 中英文版 |
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GB/T 26112-2010 Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters 微机电系统（MEMS）技术 微机械量评定总则 - 中英文版 |
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GB/T 26111-2010 Micro-electromechanical system technology - Terms 微机电系统（MEMS）技术 术语 - 中英文版 |
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