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NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
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GB/T 41064-2021
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Surface chemical analysis—Depth profiling—Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films |
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Issued Date: |
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Implemented Date: |
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Issued by: |
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The Standardization Administration of the People's Republic of China |
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"GB/T 41064-2021" standard !
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| GB Standard Code |
GB/T 41064-2021 |
| Standard Category |
China National Standards |
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GB Standard English Title |
Surface chemical analysis—Depth profiling—Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films |
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GB Standard Chinese Title |
表面化学分析 深度剖析 用单层和多层薄膜测定X射线光电子能谱、俄歇电子能谱和二次离子质谱中深度剖析溅射速率的方法 |
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