Evaluation of near-e standards english version

NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 43894.1-2024

Evaluation of near-edge geometry of semiconductor wafers - Part 1: High radial second derivative method (ZDD)

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Implemented Date:

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 43894.1-2024
Standard Category	China National Standards
GB Standard English Title	Evaluation of near-edge geometry of semiconductor wafers - Part 1: High radial second derivative method (ZDD)
GB Standard Chinese Title	半导体晶片近边缘几何形态评价-第1部分：高度径向二阶导数法（ZDD）
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