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GB/T 42897-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS nano-thickness film tensile strength test method - 英文版 |
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GB/T 42896-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS nanoscale structure impact test method - 英文版 |
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GB/T 42895-2023 Microelectromechanical systems (MEMS) technology Silicon-based MEMS microstructure bending strength test method - 英文版 |
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GB/T 42709.7-2023 Semiconductor devices Microelectromechanical devices Part 7: MEMS bulk acoustic wave filters and duplexers for radio frequency control and selection - 英文版 |
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GB/T 42709.5-2023 Semiconductor devices Microelectromechanical devices Part 5: RF MEMS switches - 英文版 |
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GB/T 41852-2022 Semiconductor devices; microelectromechanical devices; bending and shearing test methods for bonding strength of MEMS structures - 英文版 |
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GB/T 2900.104-2021 Electrotechnical terminology—Micro-electromechanical devices - 英文版 |
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GB/T 38446-2020 Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films - 英文版 |
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GB/T 38447-2020 Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration - 英文版 |
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GB/T 38341-2019 Micro-electromechanical system technology—The reliability test methods of MEMS in integrated environments - 英文版 |
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GB/T 34898-2017 Micro electromechanical system technology—Test method for the nonlinear vibration of the MEMS resonant sensitive element - 英文版 |
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GB/T 34894-2017 Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer - 英文版 |
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GB/T 34900-2017 Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer - 英文版 |
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GB/T 34893-2017 Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer - 英文版 |
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GB/T 34899-2017 Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy - 英文版 |
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GB/T 32817-2016 Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS - 英文版 |
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GB/T 26113-2010 Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters - 英文版 |
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GB/T 26112-2010 Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters - 英文版 |
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GB/T 26111-2010 Micro-electromechanical system technology - Terms - 英文版 |
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